Charge state dependence of cathodic vacuum arc ion energy and velocity distributions

Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs

We report measurements of ion energy distributions of ionized species in titanium and aluminium filtered cathodic vacuum arcs operating in oxygen and nitrogen gas atmospheres. The ion energy distributions were recorded using a Hiden mass selected ion energy analyzer. The results show that a significant reduction in ion energies and a change in the shape of ion energy distributions occurs as the...

Temporal development of ion beam mean charge state in pulsed vacuum arc ion sources.

Vacuum arc ion sources, commonly also known as "Mevva" ion sources, are used to generate intense pulsed metal ion beams. It is known that the mean charge state of the ion beam lies between 1 and 4, depending on cathode material, arc current, arc pulse duration, presence or absence of magnetic field at the cathode, as well as background gas pressure. A characteristic of the vacuum arc ion beam i...

Axial ion charge state distribution in the vacuum arc plasma jet

We report on our experimental studies of the ion charge state distribution ~CSD! of vacuum arc plasmas using a time-of-flight diagnostic method. The dependence of the CSD on the axial distance from the plasma source region was measured for a titanium vacuum arc. It was found that the axial CSD profile is nonuniform. Generally, the mean charge state increases approximately linearly with axial di...

Ion energy distribution functions of vacuum arc plasmas

Deposition of permalloy films by filtered cathodic vacuum arc

The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...